Semiconductor Equipment Sealing Systems
Performance Sealing Inc. (PSI) designs and manufactures high performance seals for Semiconductor Equipment systems. The PSI family of Duron® materials can handle a wide variety of solvents, high pressures, and wear restrictions. PSI has a wide selection of spring energizers that allows the seal to be engineered to specific application requirements. Typical gland dimensions Duruseals® are designed for are Mil G-5514, JIS B 2401 and AS416. The Performance Sealing Inc. Quality Management System is certified to AS9100C and ISO 9001:2008.
Semiconductor Equipment Sealing Solution Applications
- Sputtering chambers
- Slicing wafer chips
- Etching machine
- High temperature door seals
- Vacuum pump
- Dosing equipment
- Crystal growth chambers
- Dry plasma etching
- Resist stripping
The Semiconductor Equipment Sealing Project Engineering Team stands ready to deliver a sealing solution to you. Contact us today!
Request A Quote Online Or Call Us At 866.429.2536