Semiconductor Equipment Seals & Sealing Systems

Semiconductor Equipment Sealing Systems

cantilever finger spring Duruseal® F cantilever finger spring is designed for use in dynamic applications where high deflection and low load is desired.
elastomer loaded O-ring Duruseal® O an elastomer loaded O-ring is designed for use in metal free environments.
vacuum sealing helical coil Duruseal®=` H a helical coil is designed for use in low pressure or vacuum sealing requirements.

Performance Sealing Inc. (PSI) designs and manufactures high performance seals for Semiconductor Equipment systems. The PSI family of Duron® materials can handle a wide variety of solvents, high pressures, and wear restrictions. PSI has a wide selection of spring energizers that allows the seal to be engineered to specific application requirements. Typical gland dimensions Duruseals® are designed for are Mil G-5514, JIS B 2401 and AS416. The Performance Sealing Inc. Quality Management System is certified to AS9100C and ISO 9001:2008.

Semiconductor Equipment Sealing Solution Applications

  • Sputtering chambers
  • Slicing wafer chips
  • Etching machine
  • High temperature door seals
  • Vacuum pump
  • Dosing equipment
  • Lithography
  • Crystal growth chambers
  • Dry plasma etching
  • Resist stripping
  • PVD

The Semiconductor Equipment Sealing Project Engineering Team stands ready to deliver a sealing solution to you. Contact us today!

Request A Quote Online Or Call Us At 866.429.2536